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Schematic diagram of a UNCD-based bioMEMS sensor.

BIOSENSOR – This sensor can detect specific biological compounds present in a gas or liquid. Receptor biomolecules, such as antibodies, are attached to a micro-cantilever made of ultrananocrystalline diamond thin-film. The cantilever is integrated with silicon-based CMOS electronics and vibrated by an electrical field. The sensor is then exposed to a gas or liquid mixture containing biological toxins. The toxins are detected when they are selectively captured by the receptor biomolecules, which makes the cantilever heavier and changes its vibration frequency. Different biological toxins and other biomolecules can be detected by attaching different receptor molecules to the cantilever.

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