Argonne National Laboratory

Nanofabrication & Devices

Nanofabrication & Devices

The Nanofabrication and Devices Group is advancing the state-of-the-art in nanofabrication and the fundamental science of nanoscale systems. The group seeks to achieve unprecedented control in the creation, integration and manipulation of nanostructures that will form the foundation of functional nanoscale devices. The main areas of research of the group fall into the following topics:

  • Integration of hybrid materials and nanostructures
  • Manipulation of nanoscale interactions
  • Studying nonlinear phenomena at the nanoscale

The group is developing new processes capable of creating features smaller than 10 nm through large area patterning, as well as micro- and nano-electromechanical systems that serve as as platforms for manipulation and control of nanostructures.

Our research helps to meet the scientific demands of our user community, which requires expertise in nanofabrication and nanodevices and access to state-of-the-art nanofabrication capabilities. A large part of the group's effort is oriented toward development of novel instrumentation and materials that the user community can exploit to advance their own research programs.

Research activities include

  • Integration of novel nanomaterials into devices
  • Manipulation of nanoscale interactions
  • Nonlinear phenomena at the nanoscale

Key Capabilities

  • Electron Beam Lithography: JEOL 9300, Raith 150
  • Focused Ion Beam: FEI Nova 600 NanoLab
  • Interferometric Lithography System
  • Laser Pattern Generator: Microtech LW405
  • AJA Oxide Sputtering
  • Atomic Layer Deposition (Sundew D200)
  • Lambda Microwave Plasma CVD System: nanocrystalline diamond deposition
  • Thermal/PECVD System for CNT and Graphene Synthesis