Argonne National Laboratory

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Electrochemistry in Fabrication of Nano-dimensional Materials and Structures: History, Accomplishments and Potential

CNM Nanoscience Colloquium
Peter Mardilovich, Hewlett-Packard
August 29, 2012 4:00PM to 5:00PM
Building 440, Room A105-106
Numerous challenges still limit the advancements in nanofabrication and fundamental understanding of nano-scale systems. For example, fab-friendly fabrication processes for nano-scale meta-materials and structures with wafer-level uniformity and reproducibility are needed. Also, new ways of fabricating nano-dimensional devices are always of interest. Electrochemical oxidation, or anodization, is one of the most powerful techniques in fabrication of materials, structures, and final devices with dimensions down to the nanometer scale.

This presentation will cover the following topics:

  • A brief historical overview of unsteady progress and activities in the area of electrochemical oxidation of metals;
  • Porous and dense oxides and their dimensional variations;
  • Self-organized nanoporous anodic alumina and its unique morphology. Use of anodic alumina for highly anisotropic micromachining, fabrication of ceramic membranes for nanofiltration, as templates for deposition of nano-tubes and nano-wires;
  • Wafer-level fabrication of uniform sub-10 nm multilayer systems with unprecedented level of precision and reproducibility; planarization capabilities at sub-nm level;
  • Fabrication of nano-pillars with widely ranging shapes and sizes, as components of nano-devices.

Finally, prospects of the electrochemical nanofabrication method will be discussed.