Argonne National Laboratory

Upcoming Events

Integrated Technology Solutions Enabling Micro and Nanoelectronics

NST Nanoscience Seminar
Jyoti K. Malhotra, Brewer Science, Inc
April 28, 2014 11:00AM to 12:00PM
Building 440, Room A105-106
This seminar will highlight the following key Brewer Science technologies:

  • Advanced Lithography (sub-14 nm): Anti-reflective coatings and material strategies for directed self-assembly, EUV, and 450-mm lithography
  • Advanced 3-D Packaging: Temporary bonding materials and processes for thin wafer handling
  • MEMS and Displays: Etch protective materials for surface modification and surface protection during Si wet etching; planarizing optical coatings; light control through index matching
  • Carbon Electronics: Electronics-grade carbon nanotube (CNT) solutions for printed electronics, non-volatile memory applications, and variety of sensors Processing Equipment: Benchtop equipment for pre-litho steps and temporary bonding/debonding