Argonne National Laboratory

Upcoming Events

An Overview of Wafer Processing Systems from Osiris: Coat-Develop, Liftoff, Cleaning, and Mounting Tools

April 26, 2017 10:00AM to 11:00AM
Bruce Neufeld, Osiris International
Building 440, Room A105-106
HEP/NST Seminar

Abstract: Osiris International is a manufacturer of a wide line of wafer processing tools for the semiconductor and MEMS industries. We manufacture coat/develop, liftoff, wafer cleaning, and mounting/demounting tools. This presentation will provide an overview of the company and our line of tools. Tools can be configured from manual to fully automated with features such as variable substrate size, edge bead removal that matches the substrate shape, high thickness uniformity, and no-soak high-pressure liftoff.