Zone Plates for High Photon Energy Focusing - Lessons from the Past, Reinterpreted
The presentation reviews the main achievements in zone plates fabrication for X-ray focusing, with accents on how the existent knowledge can be extended to reach the goal of 20 nm resolution at 25 keV photon energy. Several approaches will be discussed, revealing that traditional nanofabrication ways will not work, while new, combined approaches will do the job.
Among the discussed methods: sequential height increases by soft x-ray exposure and electroforming, layered depositions and nanolaminates, zone doubling and resolution increase by adding higher order zones, stacking and composing zone plates by MEMS-enabled alignment, diamond Fresnel lenses, and others. Combining the positives of these approaches leads to a heavily-engineered concept of zone plates fabrication, but with good chances of success, and even a perspective for higher photon energies.