Argonne National Laboratory

Tunable Resistance Coatings

Technology available for licensing: The invention relates to tunable resistance coatings: compositions of matter and methods of manufacture of M:AlOx thin films having tunable resistance where M=W, Mo, or conducting compounds containing these metals.


  • A conducting material and an insulating material are deposited by such methods as ALD or CVD to construct composites with intermixed materials which do not have structure or properties like their bulk counterparts.
  • The coatings can be tuned to the produce the appropriate resistivity needed by a particular application.

US Patent No. 8,921,799