Argonne National Laboratory

Tunable Resistance Coatings

Technology available for licensing: A method and article of manufacture of intermixed tunable resistance composite materials containing at least one of W:Al.sub.2O.sub.3, Mo:Al.sub.2O.sub.3 or M:Al.sub.2O.sub.3 where M is a conducting compound containing either W or Mo.


  • A conducting material and an insulating material are deposited by such methods as ALD or CVD to construct composites with intermixed materials which do not have structure or properties like their bulk counterparts.
  • The coatings can be tuned to the produce the appropriate resistivity needed by a particular application.

US Patent No. 9,105,379