Argonne National Laboratory

Instrumentation & Devices

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ALD Reactor for Coating Porous Substrates

  • Improved ALD reactor for coating substrates, particularly porous substrates having an aspect ratio, defined as pore length divided by pore diameter, of greater than about 10-1000, and a high surface area by virtue of the porosity
  • These features serve to improve the uniformity of the precursor flux, resulting in improved thickness and compositional uniformity of the deposited layers on the porous substrate

Use of Flat Panel Microchannel Photomultipliers in Sampling Calorimeters with Timing

  • Large-area, flat-panel photo-detectors with sub-nanosecond time resolution based on microchannel plates
  • Detectors may be used in a variety of applications including: medical imaging, security, and particle and nuclear physics

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