Instrumentation & Devices
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- Improved ALD reactor for coating substrates, particularly porous substrates having an aspect ratio, defined as pore length divided by pore diameter, of greater than about 10-1000, and a high surface area by virtue of the porosity
- These features serve to improve the uniformity of the precursor flux, resulting in improved thickness and compositional uniformity of the deposited layers on the porous substrate
- Large-area, flat-panel photo-detectors with sub-nanosecond time resolution based on microchannel plates
- Detectors may be used in a variety of applications including: medical imaging, security, and particle and nuclear physics