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Ordered Nanoscale Domains by Infiltration of Block Co-Polymers (ANL-IN-10-017 and ANL-IN-10-017B)

A method of preparing tunable inorganic patterned nanofeatures by infiltration of a block copolymer scaffold having a plurality of self-assembled periodic polymer microdomains
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Ordered nanoscale domains by infiltration of block copolymers
  • ANL-IN-10-017 entitled Ordered nanoscale domains by infiltration of block copolymers”

The method may use sequential infiltration synthesis (SIS), related to atomic layer deposition (ALD).


  • Tunable inorganic features can be selectively formed on the microdomain to form a hybrid organic/inorganic composite material of the metal precursor and a co-reactant.
  • The organic component may be optionally removed to obtain inorganic features with patterned nanostructures defined by the configuration of the microdomain.