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Liliana Stan

Principal Engineering Specialist



Extensive experience on designing, synthesis, and characterization of multilayered structures of metal, complex-oxide films, and multifunctional nanocomposites using physical vapor deposition techniques (sputtering, ion beam assisted deposition (IBAD), e-beam evaporation) and atomic layer deposition (ALD). 

Educational background

  • M.S. Electrical Engineering, University of New Mexico.
  • B.S. Physics, University of Bucharest, Romania

Research interests

  • Design and development of functional structures incorporating ferroelectric and piezoelectric thin films for device fabrication and processing-microstructure-property relationship studies.
  • Synthesis and characterization of heterostructures and metamaterials for photonic applications.
  • Epitaxial growth of complex oxide films using off-axis sputtering.
  • Synthesis of dielectric materials using ALD and their applications to nanoscale devices.


Argonne researchers win three 2016 R&D 100 Awards