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Science and Technology Partnerships and Outreach

All 2D High Mobility, Flexible, Transparent, Thinnest Thin Transistor (ANL-IN-14-013)

A two-dimensional thin film transistor and a method for manufacturing a two-dimensional thin film transistor
Intellectual Property Available to License
US Patent 9,548,394
  • All 2D, high mobility, flexible, transparent thin film transistor

A two-dimensional thin film transistor and a method for manufacturing a two-dimensional thin film transistor includes layering a semiconducting channel material on a substrate, providing a first electrode material on top of the semiconducting channel material, patterning a source metal electrode and a drain metal electrode at opposite ends of the semiconducting channel material from the first electrode material, opening a window between the source metal electrode and the drain metal electrode, removing the first electrode material from the window located above the semiconducting channel material providing a gate dielectric above the semiconducting channel material, and providing a top gate above the gate dielectric, the top gate formed from a second electrode material. The semiconducting channel material is made of tungsten diselenide, the first electrode material and the second electrode material are made of graphene, and the gate dielectric is made of hexagonal boron nitride.

Benefits

  • Flexible, transparent high mobility thin film transistor for flat panel display 
  • 10 atomic layers thick 
  • On/off ratio is as good as current commercial thin-film transistors