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RF MEMS Capacitive Switches With High Reliability (ANL-IN-09-053)

A reliable long life RF-MEMS capacitive switch
Intellectual Property Available to License
US Patent 8,525,185
  • RF MEMS Capacitive Switches With High Reliability (ANL-IN-09-053)

A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a fast discharge diamond dielectric layer” and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.

Benefits

  • A specialized radio frequency (RF) micro-electromechanical system (MEMS) switch that promises enhanced capabilities for next-generation military and commercial communication systems 
  • Robust and reliable with extremely low power consumption; prevents overcharge and improves safety 
  • CMOS Compatible