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Ultra-nano Crystalline Diamond Contacts for Diamond Electronic Devices (ANL-IN-12-098B)
A method of forming electrical contacts on a diamond substrate comprises producing a plasma ball using a microwave plasma source in the presence of a mixture of gases
Intellectual Property Available to License
ULTRA-NANO CRYSTALLINE DIAMOND CONTACTS FOR DIAMOND ELECTRONIC DEVICES
- ANL-IN-12-098 entitled “ULTRA-NANO CRYSTALLINE DIAMOND CONTACTS FOR DIAMOND ELECTRONIC DEVICES”
The mixture of gases include a source of a p-type or an n-type dopant. The plasma ball is disposed at a first distance from the diamond substrate. The diamond substrate is maintained at a first temperature. The plasma ball is maintained at the first distance from the diamond substrate for a first time, and a UNCD film, which is doped with at least one of a p-type dopant and an n-type dopant, is disposed on the diamond substrate. The doped UNCD film is patterned to define UNCD electrical contacts on the diamond substrate.
Benefits
- Efficient x-ray position detector for synchrotron applications