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Center for Nanoscale Materials

Nanofabrication and Devices

We fabricate, integrate and manipulate nanostructures including incorporation—under cleanroom conditions—of elements that couple mechanical, optical and electrical signals to produce working nanofabricated structures.

We are advancing the state-of-the-art in nanofabrication and the fundamental science of nanoscale systems. Our group seeks to achieve unprecedented control in the creation, integration and manipulation of nanostructures that will form the foundation of functional nanoscale devices. The main areas of research of our group fall into the following topics:

  • Integration of hybrid materials and nanostructures
  • Manipulation of nanoscale interactions
  • Studying nonlinear phenomena at the nanoscale

We are developing new processes capable of creating features smaller than 10 nm through large area patterning, as well as micro- and nano-electromechanical systems that serve as platforms for manipulation and control of nanostructures.

Our research helps to meet the scientific demands of the Center for Nanoscale Materials’ user community, which requires expertise in nanofabrication and nanodevices and access to state-of-the-art nanofabrication capabilities. A large part of our group’s effort is oriented toward development of novel instrumentation and materials that the user community can exploit to advance their own research programs.

Research activities include:

  • Dielectric metasurfaces and nanostructures
  • Solid lubricants based on 2D materials
  • Nonlinear dynamics of nano-mechanical devices
  • Quantum wave-function engineering with quantum solids
  • Design and fabrication of origami and kirigami structures

KEY CAPABILITIES

  • Electron Beam Lithography: JEOL 9300, Raith 150
  • Optical Lithography: Karl Suss MA6 and ASML PAS 5000 Stepper
  • Focused Ion Beam: FEI Nova 600 NanoLab
  • Plasma Enhanced Chemical Deposition: Applied Materials P5000 and Oxford PlasmaLab 100 
  • Temescal FC2000 e-beam evaporator
  • Atomic Layer Deposition: GEMSTAR system 
  • Laser Pattern Generators: Microtech LW405 and Heidelberg MLA150
  • AJA Oxide Sputtering
  • Lambda Microwave Plasma CVD System: nanocrystalline diamond deposition
  • XeF2 etching system

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