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Nanofabrication and Devices

We fabricate, integrate and manipulate nanostructures, including incorporation—under cleanroom conditions—of elements that couple mechanical, optical, and electrical signals to produce working nanofabricated structures.

We are advancing the state-of-the-art in nanofabrication and the fundamental science of nanoscale systems. Our group seeks to achieve unprecedented control in the creation, integration, and manipulation of nanostructures that will form the foundation of functional nanoscale devices. The main areas of research of our group fall into the following topics:

  • Integration of hybrid materials and nanostructures
  • Manipulation of nanoscale interactions
  • Study of nonlinear phenomena at the nanoscale
A new qubit platform: Electrons from a heated light filament (top) land on solid neon (red block), where a single electron (represented as a wave function in blue) is trapped and manipulated by a superconducting quantum circuit (bottom patterned chip). (Image by Dafei Jin/Argonne National Laboratory

Our research helps to meet the scientific demands of the CNM user community, which requires expertise in nanofabrication and nanodevices and access to state-of-the-art nanofabrication capabilities. A large part of our group’s effort is oriented toward development of novel instrumentation and materials that the user community can exploit to advance their own research programs. 

Research activities include:

  • Development of solid lubricants based on 2D materials
  • Research on nonlinear dynamics of nano-mechanical devices
  • Quantum wave-function engineering with quantum solids
  • Creation of superconducting components to advance programs in quantum information science
  • Materials integration and development of novel devices


  • Electron Beam Lithography: JEOL 8100FS, Raith 150
  • Optical Lithography: Karl Suss MA6 and ASML PAS 5000 Stepper
  • Laser Pattern Generators: Microtech LW405 and Heidelberg MLA150
  • Ultralow Temperature/Strong Magnetic Field Measurements 
  • Focused Ion Beam: FEI Nova 600 NanoLab
  • Plasma Enhanced Chemical Deposition: Applied Materials P5000 and Oxford PlasmaLab 100 
  • Temescal FC2000 e-beam evaporator
  • Reactive ion etching: Oxford PlasmaLab and Applied Materials P5000
  • Atomic Layer Deposition: GEMSTAR system 
  • AJA systems (oxides, dielectric, metals, etc.)
  • Lambda Microwave Plasma CVD System: nanocrystalline diamond deposition

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