Anil Mane is a Principal Material Science Engineer in Argonne’s Energy Systems division. He has extensive research and development experience in the field of thin film nanostructure materials growth by ALD, CVD, PVD and MBE methods, characterization, and integration into nano-devices. He also has over five years of semiconductor industry R&D experience in thin film process development on high-volume 300mm CVD and ALD production tools and material integration.
Mane has more than 60 peer-reviewed publications, more than 10 patents, 30-plus inventions and 3 R&D100 awards (known as the “Oscars of Innovation”). His current research interests include:
- Research and development of next-generation technologically feasible nanostructure materials design, creation and engineering, especially by ALD/CVD techniques.
- In-situ materials growth study, focus on surface/interface chemistry, thorough materials and test devices characterizations and search for near-term emerging applications.
- Identification of new nanotechnology based products, development from concept research to scale-up and technology commercialization.
- Photodetector, MEMS devices, 2D Materials, Nanocomposites, Functional coatings, Sensors, etc.