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Rui Liu

Assistant Scientist

Deposition and fabrication of thin films for quantum information and microelectronics; X-ray nanoprobe microscopy.

Biography

Rui Liu is an Assistant Scientist at the Center for Nanoscale Materials, working jointly with the CNM/APS Hard X-ray Nanoprobe (26-ID). His research targets epitaxial complex-oxide thin films and nanostructures for quantum information and microelectronics, integrating synthesis and fabrication, especially solid-phase epitaxy in lithographically defined nanoscale geometries. He develops AI-assisted, autonomous sputter-beam epitaxy with in situ RHEED, SHG, and ellipsometry to access metastable phases and accelerate materials discovery. Leveraging strain and polarization engineering to concentrate optical and electronic fields at the 10-nm scale, his work advances electro-optic cavities for quantum transduction, ultradense ferroelectric memories, and programmable oxide/2D materials interfaces. At the synchrotron, he develops in-situ/operando X-ray nanoprobe microscopy, including nanodiffraction and coherent Bragg imaging/ptychography, to resolve stress, lattice rotation, and domain dynamics during optical pump and device operation.

Open Positions:

I’m hiring two postdocs to couples solid-phase epitaxy of complex oxides, AI-assisted autonomous growth, nanoscale fabrication, and synchrotron X-ray characterization to enable electro-optic quantum transduction and device-relevant architectures.
Postdoc 1 — Epitaxial Oxide Nanostructures for Quantum Information
Postdoc 2 — Fabrication for Photonic & Quantum Devices

Also co-advising graduate students with universities at CNM and APS.
SCGSR / SULI / CCI / ESRP graduate, undergraduate, and high-school students are welcome.

Please contact me at rui.​liu@​anl.​gov if interested.

Professional Experience:

  • 2024-present       Assistant Scientist, Center for Nanoscale Materials, Argonne National Laboratory
  • 2020-2024           Research Associate, University of Wisconsin-Madison

Education:

  • 2013-2019            Ph.D. in Physics, Stony Brook University, SUNY, NY
  • 2008-2012           B.S. in Physics, Nanjing University, China

Research Topics:

  • Solid-phase epitaxy of complex oxides in lithographically defined, nanoscale-confined geometries.
  • Artificially engineered nanoscale perovskite oxides (ferroelectrics, correlated oxides) for quantum, photonic, and microelectronic applications.
  • AI-assisted autonomous sputter-beam epitaxy for metastable phases and rapid recipe discovery.
  • In-situ/operando hard X-ray diffraction microscopy (nanodiffraction, Bragg ptychography) and coherent X-ray scattering under deposition, heating/cooling, DC/RF bias, liquid/gas, and laser pump.

Current/Previous Projects:

  • Center for Nanoscale Materials, Electron and X-ray Microscopy: Synthesis and nanofabrication of complex-oxide thin films/nanostructures for quantum information and microelectronics, support users as part of DOE NSRC program.
  • Hard X-ray Nanoprobe: Nanoscale X-ray diffraction/ptychography to map stress, lattice rotation, and domain dynamics in operando, support users as part of DOE X-ray light sources program.
  • Department of Energy, Scientific User Facilities, AI-assisted Autonomous Epitaxial Synthesis Platform with Real-Time Optical and Electron Characterization.” (Lead PI, 2025 - present)
  • Department of Energy, Scientific User Facilities, In-situ Heating, Biasing, and Environmental (Gas/Liquid) Holder for Integrated Use across X-ray Nanoprobe, TEM, and SEM.” (Lead PI, 2026 - present)
  • Argonne LDRD Light-Matter program (Lead PI, 2026-2029) High-efficiency electro-optic cavities for quantum transduction in solid-phase epitaxially defined hybrid nanostructures.”

Selected Publications:

Full publication list see google scholar.

Patents:

Current Students/Postdocs:

  • Rui Liang — Graduate student (co-advised with Sangkee Min, University of Wisconsin–Madison)
    • Research Topic: X-ray nanoprobe microscopy of surface and near-surface effects in single-crystal wafers
  • Alecsander Haake-Guzman — Undergraduate Intern (DOE-CCI)
    • Research Topic: AI-driven autonomous synthesis using machine-learning models for materials discovery