A method of preparing tunable inorganic patterned nanofeatures by infiltration of a block copolymer scaffold having a plurality of self-assembled periodic polymer microdomains
Intellectual Property Available to License
Ordered nanoscale domains by infiltration of block copolymers
- ANL-IN-10-017 entitled “Ordered nanoscale domains by infiltration of block copolymers”
The method may use sequential infiltration synthesis (SIS), related to atomic layer deposition (ALD).
Benefits
- Tunable inorganic features can be selectively formed on the microdomain to form a hybrid organic/inorganic composite material of the metal precursor and a co-reactant.
- The organic component may be optionally removed to obtain inorganic features with patterned nanostructures defined by the configuration of the microdomain.